Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651062 | Substrate treating apparatus | Yasuhiro Fukumoto, Yuji Tanaka, Takeharu Ishii | 2020-05-12 |
| 10578741 | Distance detection device and distance detection method | Yoshinobu KOUNO, Shin Tabuchi | 2020-03-03 |
| 10546766 | Inspection device and substrate processing apparatus | Koji Nakagawa | 2020-01-28 |