Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784125 | Substrate treating apparatus | — | 2020-09-22 |
| 10651056 | Treating liquid vaporizing apparatus | Atsushi Tanaka, Koji Nishi, Shigehiro Goto, Toru Momma | 2020-05-12 |
| 10573546 | Substrate treating apparatus | — | 2020-02-25 |