Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda +2 more | 2020-10-06 |
| 10670969 | Reverse pattern formation composition, reverse pattern formation method, and device formation method | Xiaowei Wang | 2020-06-02 |