Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825659 | Substrate processing chamber including multiple gas injection points and dual injector | Jason Lee Treadwell, Linda Marquez, Cristian Siladie | 2020-11-03 |
| 10727089 | Systems and methods for selectively etching film | James Eugene Caron, Joon Hong Park, Dengliang Yang | 2020-07-28 |
| 10699878 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | James Eugene Caron, Jason Lee Treadwell, Joon Hong Park, Canfeng Lai | 2020-06-30 |
| 10651015 | Variable depth edge ring for etch uniformity control | Cristian Siladie, Dean J. Larson, Brian Severson | 2020-05-12 |