Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727089 | Systems and methods for selectively etching film | Ivelin Angelov, Joon Hong Park, Dengliang Yang | 2020-07-28 |
| 10699878 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | Ivelin Angelov, Jason Lee Treadwell, Joon Hong Park, Canfeng Lai | 2020-06-30 |