Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825659 | Substrate processing chamber including multiple gas injection points and dual injector | Ivelin Angelov, Linda Marquez, Cristian Siladie | 2020-11-03 |
| 10699878 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | James Eugene Caron, Ivelin Angelov, Joon Hong Park, Canfeng Lai | 2020-06-30 |