Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727089 | Systems and methods for selectively etching film | James Eugene Caron, Ivelin Angelov, Dengliang Yang | 2020-07-28 |
| 10699878 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | James Eugene Caron, Ivelin Angelov, Jason Lee Treadwell, Canfeng Lai | 2020-06-30 |