Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825659 | Substrate processing chamber including multiple gas injection points and dual injector | Jason Lee Treadwell, Ivelin Angelov, Linda Marquez | 2020-11-03 |
| 10651015 | Variable depth edge ring for etch uniformity control | Ivelin Angelov, Dean J. Larson, Brian Severson | 2020-05-12 |