Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651015 | Variable depth edge ring for etch uniformity control | Ivelin Angelov, Cristian Siladie, Dean J. Larson | 2020-05-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651015 | Variable depth edge ring for etch uniformity control | Ivelin Angelov, Cristian Siladie, Dean J. Larson | 2020-05-12 |