Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790136 | Method of manufacturing semiconductor device, substrate processing system and non-transitory computer-readable recording medium | Tatsuru Matsuoka | 2020-09-29 |
| 10770287 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2020-09-08 |
| 10763101 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Hiroki Yamashita | 2020-09-01 |
| 10755921 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yoshiro Hirose, Tatsuru Matsuoka | 2020-08-25 |
| 10626502 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka | 2020-04-21 |
| 10600642 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose | 2020-03-24 |
| 10586698 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yushin Takasawa, Masaya NAGATO | 2020-03-10 |