Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770287 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshitomo HASHIMOTO | 2020-09-08 |
| 10604842 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yushin Takasawa, Satoshi Shimamoto, Shin SONE | 2020-03-31 |
| 10607833 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Ozaki, Masato Terasaki, Risa YAMAKOSHI, Satoshi Shimamoto, Jiro Yugami +1 more | 2020-03-31 |