Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840094 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohiko Maeda, Yasuhiro Megawa, Takahiro MIYAKURA, Akito Hirano, Takashi Nakagawa | 2020-11-17 |
| 10714336 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hideki Horita | 2020-07-14 |
| 10607833 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Takashi Ozaki, Risa YAMAKOSHI, Satoshi Shimamoto, Jiro Yugami +1 more | 2020-03-31 |