Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840094 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohiko Maeda, Masato Terasaki, Yasuhiro Megawa, Akito Hirano, Takashi Nakagawa | 2020-11-17 |
| 10529560 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Atsushi Moriya, Naoharu Nakaiso, Kensuke HAGA | 2020-01-07 |