Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529560 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takahiro MIYAKURA, Atsushi Moriya, Kensuke HAGA | 2020-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529560 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takahiro MIYAKURA, Atsushi Moriya, Kensuke HAGA | 2020-01-07 |