Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804100 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Kenji Kameda, Atsushi Sano | 2020-10-13 |
| 10790136 | Method of manufacturing semiconductor device, substrate processing system and non-transitory computer-readable recording medium | Yoshitomo HASHIMOTO | 2020-09-29 |
| 10770287 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2020-09-08 |
| 10755921 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose | 2020-08-25 |
| 10626502 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2020-04-21 |