Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804100 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Atsushi Sano, Tatsuru Matsuoka | 2020-10-13 |
| 10724137 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and cleaning completion determining method | Osamu Morita, Shinichiro Mori | 2020-07-28 |