Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755921 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2020-08-25 |
| 10607833 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Takashi Ozaki, Masato Terasaki, Risa YAMAKOSHI, Satoshi Shimamoto +1 more | 2020-03-31 |
| 10600642 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2020-03-24 |