Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720325 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takafumi Nitta, Satoshi Shimamoto, Hiroki Yamashita | 2020-07-21 |
| 10604842 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Satoshi Shimamoto, Shin SONE | 2020-03-31 |
| 10586698 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yoshitomo HASHIMOTO, Masaya NAGATO | 2020-03-10 |