Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763101 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Hiroki Yamashita | 2020-09-01 |
| 10720325 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Yushin Takasawa, Satoshi Shimamoto, Hiroki Yamashita | 2020-07-21 |