Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879044 | Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing | Yuhou Wang, Arthur H. Sato, Alexander Paterson | 2020-12-29 |
| 10755896 | Multi-level pulsing of DC and RF signals | Juline Shoeb, Alex Paterson | 2020-08-25 |
| 10679825 | Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate | Alex Paterson, John Drewery, Arthur H. Sato | 2020-06-09 |
| 10672590 | Frequency tuning for a matchless plasma source | Maolin Long, Yuhou Wang, Alex Paterson | 2020-06-02 |
| 10580618 | Multi-level pulsing of DC and RF signals | Juline Shoeb, Alex Paterson | 2020-03-03 |
| 10573494 | Multi-level parameter and frequency pulsing with a low angular spread | Juline Shoeb, Alex Paterson | 2020-02-25 |