Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867853 | Subtractive plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects | Kevin Lin, Robert L. Bristol | 2020-12-15 |
| 10804141 | Damascene plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects | Kevin Lin, Robert L. Bristol | 2020-10-13 |
| 10770291 | Methods and masks for line end formation for back end of line (BEOL) interconnects and structures resulting therefrom | Charles H. Wallace | 2020-09-08 |
| 10553532 | Structure and method to self align via to top and bottom of tight pitch metal interconnect layers | Manish Chandhok, Robert L. Bristol, Mauro J. Kobrinsky, Kevin Lin | 2020-02-04 |
| 10546772 | Self-aligned via below subtractively patterned interconnect | Manish Chandhok, Hui Jae Yoo, Kevin Lin, Jasmeet S. Chawla, Stephanie A. Bojarski +3 more | 2020-01-28 |