Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867853 | Subtractive plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects | Robert L. Bristol, Richard E. Schenker | 2020-12-15 |
| 10804141 | Damascene plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects | Robert L. Bristol, Richard E. Schenker | 2020-10-13 |
| 10796909 | Surface-aligned lithographic patterning approaches for back end of line (BEOL) interconnect fabrication | Robert L. Bristol, James M. Blackwell | 2020-10-06 |
| 10643946 | Nitrogen assisted oxide gapfill | Sudipto Naskar, Manish Chandhok, Ryan Pearce | 2020-05-05 |
| 10615117 | Self-aligned via | Robert L. Bristol, Rami Hourani, James M. Blackwell | 2020-04-07 |
| 10593627 | Doric pillar supported maskless airgap structure for capacitance benefit with unlanded via solution | Kanwal Jit Singh, Robert L. Bristol | 2020-03-17 |
| 10553532 | Structure and method to self align via to top and bottom of tight pitch metal interconnect layers | Richard E. Schenker, Manish Chandhok, Robert L. Bristol, Mauro J. Kobrinsky | 2020-02-04 |
| 10546772 | Self-aligned via below subtractively patterned interconnect | Manish Chandhok, Richard E. Schenker, Hui Jae Yoo, Jasmeet S. Chawla, Stephanie A. Bojarski +3 more | 2020-01-28 |