| 10867853 |
Subtractive plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects |
Robert L. Bristol, Richard E. Schenker |
2020-12-15 |
| 10804141 |
Damascene plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects |
Robert L. Bristol, Richard E. Schenker |
2020-10-13 |
| 10796909 |
Surface-aligned lithographic patterning approaches for back end of line (BEOL) interconnect fabrication |
Robert L. Bristol, James M. Blackwell |
2020-10-06 |
| 10643946 |
Nitrogen assisted oxide gapfill |
Sudipto Naskar, Manish Chandhok, Ryan Pearce |
2020-05-05 |
| 10615117 |
Self-aligned via |
Robert L. Bristol, Rami Hourani, James M. Blackwell |
2020-04-07 |
| 10593627 |
Doric pillar supported maskless airgap structure for capacitance benefit with unlanded via solution |
Kanwal Jit Singh, Robert L. Bristol |
2020-03-17 |
| 10553532 |
Structure and method to self align via to top and bottom of tight pitch metal interconnect layers |
Richard E. Schenker, Manish Chandhok, Robert L. Bristol, Mauro J. Kobrinsky |
2020-02-04 |
| 10546772 |
Self-aligned via below subtractively patterned interconnect |
Manish Chandhok, Richard E. Schenker, Hui Jae Yoo, Jasmeet S. Chawla, Stephanie A. Bojarski +3 more |
2020-01-28 |