Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867853 | Subtractive plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects | Kevin Lin, Richard E. Schenker | 2020-12-15 |
| 10804141 | Damascene plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects | Kevin Lin, Richard E. Schenker | 2020-10-13 |
| 10796909 | Surface-aligned lithographic patterning approaches for back end of line (BEOL) interconnect fabrication | Kevin Lin, James M. Blackwell | 2020-10-06 |
| 10692757 | Means to decouple the diffusion and solubility switch mechanisms of photoresists | Marie Krysak, Paul A. Nyhus, Michael J. Leeson | 2020-06-23 |
| 10644113 | Quantum dot array devices | James S. Clarke, Ravi Pillarisetty, Jeanette M. Roberts, Hubert C. George, Nicole K. Thomas | 2020-05-05 |
| 10615117 | Self-aligned via | Kevin Lin, Rami Hourani, James M. Blackwell | 2020-04-07 |
| 10593627 | Doric pillar supported maskless airgap structure for capacitance benefit with unlanded via solution | Kanwal Jit Singh, Kevin Lin | 2020-03-17 |
| 10553532 | Structure and method to self align via to top and bottom of tight pitch metal interconnect layers | Richard E. Schenker, Manish Chandhok, Mauro J. Kobrinsky, Kevin Lin | 2020-02-04 |