Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692757 | Means to decouple the diffusion and solubility switch mechanisms of photoresists | Marie Krysak, Robert L. Bristol, Michael J. Leeson | 2020-06-23 |
| 10636700 | Metal via processing schemes with via critical dimension (CD) control for back end of line (BEOL) interconnects and the resulting structures | Mohit K. HARAN, Charles H. Wallace, Robert M. Bigwood, Deepak S. Rao, Alexander F. Kaplan | 2020-04-28 |
| 10600678 | Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects | Charles H. Wallace, Elliot N. Tan, Swaminathan Sivakumar | 2020-03-24 |
| 10559529 | Pitch division patterning approaches with increased overlay margin for back end of line (BEOL) interconnect fabrication and structures resulting therefrom | Charles H. Wallace, Leonard P. GULER, Manish Chandhok | 2020-02-11 |