Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770291 | Methods and masks for line end formation for back end of line (BEOL) interconnects and structures resulting therefrom | Richard E. Schenker | 2020-09-08 |
| 10678137 | Multi-pass patterning using nonreflecting radiation lithography on an underlying grating | Manish Chandhok, Todd R. Younkin, Sang Hun Lee | 2020-06-09 |
| 10636700 | Metal via processing schemes with via critical dimension (CD) control for back end of line (BEOL) interconnects and the resulting structures | Paul A. Nyhus, Mohit K. HARAN, Robert M. Bigwood, Deepak S. Rao, Alexander F. Kaplan | 2020-04-28 |
| 10607884 | Gate aligned contact and method to fabricate same | Oleg Golonzka, Swaminathan Sivakumar, Tahir Ghani | 2020-03-31 |
| 10600678 | Self-aligned isotropic etch of pre-formed vias and plugs for back end of line (BEOL) interconnects | Elliot N. Tan, Paul A. Nyhus, Swaminathan Sivakumar | 2020-03-24 |
| 10559529 | Pitch division patterning approaches with increased overlay margin for back end of line (BEOL) interconnect fabrication and structures resulting therefrom | Leonard P. GULER, Manish Chandhok, Paul A. Nyhus | 2020-02-11 |