Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859906 | Extreme ultraviolet alignment marks | Yi-Fu Hsieh, Jong-Yuh Chang, Hsin-Chang Lee | 2020-12-08 |
| 10852634 | Phase shifter mask | Chun-Lang Chen, Shih-Hao Yang | 2020-12-01 |
| 10845698 | Mask, method of forming the same and method of manufacturing a semiconductor device using the same | Chun-Lang Chen, Shih-Hao Yang, Jheng-Yuan Chen | 2020-11-24 |
| 10678126 | Semiconductor mask blanks with a compatible stop layer | Chun-Lang Chen, Boming Hsu, Tran-Hui Shen | 2020-06-09 |
| 10670956 | Photomask having a plurality of shielding layers | Chun-Lang Chen | 2020-06-02 |
| 10553428 | Reflection mode photomask and fabrication method therefore | Chun-Lang Chen | 2020-02-04 |