Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10865475 | Deposition of metal borides and silicides | Petri Raisanen, Eric James Shero, Suvi Haukka, Robert Brennan Milligan | 2020-12-15 |
| 10854444 | Sulfur-containing thin films | Suvi Haukka, Fu Tang, Jan Willem Maes, Qi Xie | 2020-12-01 |
| 10818758 | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures | Fu Tang, Peng-Fu Hsu, Qi Xie | 2020-10-27 |
| 10734497 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Kiran Shrestha, Petri Raisanen | 2020-08-04 |
| 10720331 | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures | Petri Raisanen | 2020-07-21 |
| 10665452 | Source/drain performance through conformal solid state doping | Qi Xie, David Kurt de Roest, Jacob Woodruff, Jan Willem Maes, Timothee Blanquart | 2020-05-26 |
| 10636889 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Eric James Shero, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2020-04-28 |
| 10607895 | Method for forming a semiconductor device structure comprising a gate fill metal | Qi Xie, Chiyu Zhu, Kiran Shrestha, Pauline Calka, Oreste Madia +1 more | 2020-03-31 |
| 10566223 | Systems and methods for dynamic semiconductor process scheduling | Keith R. Lawson | 2020-02-18 |
| 10553424 | Sulfur-containing thin films | Suvi Haukka, Fu Tang, Jan Willem Maes, Qi Xie | 2020-02-04 |