Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845715 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Robert B. Moore | 2020-11-24 |
| 10840104 | Controlled etch of nitride features | Eric J. Bergman, John L. Klocke, Charles Sharbono, Paul R. McHugh | 2020-11-17 |
| 10754252 | Apparatus for post exposure bake | Gregory J. Wilson, Viachslav Babayan | 2020-08-25 |