Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840104 | Controlled etch of nitride features | Eric J. Bergman, John L. Klocke, Kyle M. Hanson, Paul R. McHugh | 2020-11-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840104 | Controlled etch of nitride features | Eric J. Bergman, John L. Klocke, Kyle M. Hanson, Paul R. McHugh | 2020-11-17 |