Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840104 | Controlled etch of nitride features | John L. Klocke, Charles Sharbono, Kyle M. Hanson, Paul R. McHugh | 2020-11-17 |
| 10546762 | Drying high aspect ratio features | John L. Klocke, Paul R. McHugh, Stuart Crane, Richard W. Plavidal | 2020-01-28 |