Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840104 | Controlled etch of nitride features | Eric J. Bergman, John L. Klocke, Charles Sharbono, Kyle M. Hanson | 2020-11-17 |
| 10655226 | Apparatus and methods to improve ALD uniformity | Gregory J. Wilson, Karthik Ramanathan | 2020-05-19 |
| 10577712 | Electroplating apparatus with electrolyte agitation | Gregory J. Wilson | 2020-03-03 |
| 10570526 | Electroplating wafers having a pattern induced non-uniformity | Gregory J. Wilson | 2020-02-25 |
| 10546762 | Drying high aspect ratio features | Eric J. Bergman, John L. Klocke, Stuart Crane, Richard W. Plavidal | 2020-01-28 |