Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840104 | Controlled etch of nitride features | Eric J. Bergman, Charles Sharbono, Kyle M. Hanson, Paul R. McHugh | 2020-11-17 |
| 10546762 | Drying high aspect ratio features | Eric J. Bergman, Paul R. McHugh, Stuart Crane, Richard W. Plavidal | 2020-01-28 |