Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847337 | Side inject designs for improved radical concentrations | Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2020-11-24 |
| 10752991 | Half-angle nozzle | — | 2020-08-25 |
| 10636650 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more | 2020-04-28 |
| 10636626 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO +1 more | 2020-04-28 |
| D882536 | Plasma source liner | — | 2020-04-28 |
| D875054 | Plasma connector liner | — | 2020-02-11 |
| D875055 | Plasma connector liner | — | 2020-02-11 |
| D875053 | Plasma connector liner | — | 2020-02-11 |