Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Robert Brent Vopat, Jeffrey Blahnik, Timothy Joseph Franklin, David Blahnik +1 more | 2020-12-01 |
| 10831112 | Reticle processing system | James D. Strassner, Robert Brent Vopat, Jeffrey Blahnik | 2020-11-10 |
| 10818525 | Ambient controlled transfer module and process system | Shay Assaf, Andrew J. Constant, Jacob Newman, William T. Weaver, Stephen C. Hickerson | 2020-10-27 |
| 10643867 | Annealing system and method | Jean Delmas, Robert Brent Vopat | 2020-05-05 |