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Ramachandra Divakaruni, Arvind Kumar |
2020-07-07 |
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Lawrence A. Clevenger, Yiheng Xu, John H. Zhang |
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Advanced interconnect with air gap |
John H. Zhang, Yann Mignot, Lawrence A. Clevenger, Richard S. Wise, Yiheng Xu +2 more |
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Structure for reduced source and drain contact to gate stack capacitance |
Richard Q. Williams |
2020-01-28 |
