Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699878 | Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring | James Eugene Caron, Ivelin Angelov, Jason Lee Treadwell, Joon Hong Park | 2020-06-30 |
| 10529541 | Inductive plasma source with metallic shower head using B-field concentrator | Jeffrey Tobin, Peter I. Porshnev, Jose Antonio Marin | 2020-01-07 |