Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Mirko Vogt, Maik Stegemann +4 more | 2020-12-22 |
| 10852319 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Stephan Gerhard Albert, Sebastian PREGL, Matthias Rose | 2020-12-01 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt | 2020-06-16 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Heiko Froehlich, Thoralf Kautzsch, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2020-06-16 |
| 10580663 | Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure | Thoralf Kautzsch, Alessia Scire | 2020-03-03 |
| 10544037 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2020-01-28 |
| 10539587 | Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies | Thoralf Kautzsch | 2020-01-21 |