Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Mirko Vogt, Maik Stegemann +4 more | 2020-12-22 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt | 2020-06-16 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Thoralf Kautzsch, Maik Stegemann, Mirko Vogt +1 more | 2020-06-16 |
| 10544037 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2020-01-28 |