Issued Patents 2020
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Mirko Vogt, Maik Stegemann, Andre Roeth +4 more | 2020-12-22 |
| 10707362 | Controlling of photo-generated charge carriers | Thomas Bever, Henning Feick, Dirk Offenberg, Stefano Parascandola, Ines Uhlig +2 more | 2020-07-07 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt | 2020-06-16 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt +1 more | 2020-06-16 |
| 10681777 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Heiko Froehlich, Uwe Rudolph, Alessia Scire, Maik Stegemann, Mirko Vogt | 2020-06-09 |
| 10604405 | Forming a microelectromechanical systems (MEMS) device using silicon-on-nothing and epitaxy | — | 2020-03-31 |
| 10580663 | Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure | Steffen Bieselt, Alessia Scire | 2020-03-03 |
| 10544037 | Integrated semiconductor device and manufacturing method | Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler, Andre Roeth +2 more | 2020-01-28 |
| 10539587 | Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies | Steffen Bieselt | 2020-01-21 |