Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870575 | Stressed decoupled micro-electro-mechanical system sensor | Horst Theuss, Bernhard Knott, Thoralf Kautzsch, Maik Stegemann, Andre Roeth +4 more | 2020-12-22 |
| 10700221 | Microlens having a carrier-free optical interference filter | Ines Uhlig, Anjo Kirschner, Dirk Offenberg, Beatrice Poetschick, Bjoern Sausner +1 more | 2020-06-30 |
| 10683203 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann | 2020-06-16 |
| 10684306 | Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device | Steffen Bieselt, Heiko Froehlich, Thoralf Kautzsch, Andre Roeth, Maik Stegemann +1 more | 2020-06-16 |
| 10681777 | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures | Thoralf Kautzsch, Heiko Froehlich, Uwe Rudolph, Alessia Scire, Maik Stegemann | 2020-06-09 |
| 10544037 | Integrated semiconductor device and manufacturing method | Thoralf Kautzsch, Heiko Froehlich, Alessia Scire, Maik Stegemann, Bernhard Winkler +2 more | 2020-01-28 |