Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852319 | Micromechanical sensor and methods for producing a micromechanical sensor and a micromechanical sensor element | Erhard Landgraf, Stephan Gerhard Albert, Steffen Bieselt, Matthias Rose | 2020-12-01 |
| 10843915 | Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device | Uwe Rudolph | 2020-11-24 |