Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872779 | Plasma etching method and plasma etching apparatus | Nobuya Miyoshi, Hiroyuki Kobayashi, Kazunori Shinoda, Kohei Kawamura, Kazumasa Ookuma +1 more | 2020-12-22 |
| 10811231 | Plasma processing apparatus and plasma processing method | Tooru Aramaki, Kenetsu Yokogawa | 2020-10-20 |
| 10665516 | Etching method and plasma processing apparatus | Miyako Matsui, Kenichi Kuwahara, Naoki Yasui, Tatehito Usui, Takeshi Ohmori | 2020-05-26 |