Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672595 | Plasma processing apparatus and operation method thereof | Takeshi Ohmori, Daisuke Satou, Satomi Inoue, Kenji Maeda | 2020-06-02 |
| 10665516 | Etching method and plasma processing apparatus | Miyako Matsui, Kenichi Kuwahara, Naoki Yasui, Masaru Izawa, Takeshi Ohmori | 2020-05-26 |