Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755897 | Plasma processing apparatus and plasma processing method | Norihiko Ikeda, Kazuya Yamada | 2020-08-25 |
| 10699884 | Plasma processing apparatus and plasma processing method | Kazuya Yamada, Koichi Yamamoto, Norihiko Ikeda, Isao Mori | 2020-06-30 |
| 10665516 | Etching method and plasma processing apparatus | Miyako Matsui, Kenichi Kuwahara, Masaru Izawa, Tatehito Usui, Takeshi Ohmori | 2020-05-26 |