Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872750 | Plasma processing apparatus and plasma processing system | Ryoji Asakura, Shota Umeda, Daisuke Shiraishi, Akira Kagoshima | 2020-12-22 |
| 10872774 | Plasma processing apparatus and plasma processing method | Hao Xu, Hiroshige Uchida, Shigeru Nakamoto, Kousuke Fukuchi | 2020-12-22 |
| 10783220 | Data processing method, data processing apparatus and processing apparatus | Seiichi Watanabe, Shigeru Nakamoto, Kousuke Fukuchi | 2020-09-22 |
| 10734207 | Plasma processing apparatus and analysis method for analyzing plasma processing data | Ryoji Asakura, Daisuke Shiraishi, Akira Kagoshima | 2020-08-04 |
| 10672595 | Plasma processing apparatus and operation method thereof | Takeshi Ohmori, Daisuke Satou, Tatehito Usui, Kenji Maeda | 2020-06-02 |
| 10615010 | Plasma processing apparatus, data processing apparatus and data processing method | Seiichi Watanabe, Shigeru Nakamoto, Kousuke Fukuchi | 2020-04-07 |