HU

Hiroshige Uchida

HH Hitachi High-Technologies: 1 patents #98 of 336Top 30%
Overall (2020): #447,832 of 565,922Top 80%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10872774 Plasma processing apparatus and plasma processing method Hao Xu, Shigeru Nakamoto, Kousuke Fukuchi, Satomi Inoue 2020-12-22