Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872750 | Plasma processing apparatus and plasma processing system | Ryoji Asakura, Shota Umeda, Akira Kagoshima, Satomi Inoue | 2020-12-22 |
| 10734207 | Plasma processing apparatus and analysis method for analyzing plasma processing data | Ryoji Asakura, Akira Kagoshima, Satomi Inoue | 2020-08-04 |