SU

Shota Umeda

HH Hitachi High-Technologies: 1 patents #98 of 336Top 30%
Overall (2020): #272,521 of 565,922Top 50%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10872750 Plasma processing apparatus and plasma processing system Ryoji Asakura, Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue 2020-12-22