Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872779 | Plasma etching method and plasma etching apparatus | Nobuya Miyoshi, Hiroyuki Kobayashi, Kazunori Shinoda, Kazumasa Ookuma, Yutaka Kouzuma +1 more | 2020-12-22 |
| D901407 | Integrated type ion shield for semiconductor manufacturing apparatus | Yutaka Kouzuma, Michiaki Kobayashi, Kazuyuki Hirozane, Nobuya Miyoshi, Hiroyuki Kobayashi | 2020-11-10 |
| D900760 | Ion shield plate for semiconductor manufacturing apparatus | Yutaka Kouzuma, Michiaki Kobayashi, Kazuyuki Hirozane, Nobuya Miyoshi, Hiroyuki Kobayashi | 2020-11-03 |