Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872779 | Plasma etching method and plasma etching apparatus | Nobuya Miyoshi, Hiroyuki Kobayashi, Kazunori Shinoda, Kohei Kawamura, Kazumasa Ookuma +1 more | 2020-12-22 |
| D901407 | Integrated type ion shield for semiconductor manufacturing apparatus | Michiaki Kobayashi, Kazuyuki Hirozane, Nobuya Miyoshi, Kohei Kawamura, Hiroyuki Kobayashi | 2020-11-10 |
| 10825664 | Wafer processing method and wafer processing apparatus | Tomoyuki Watanabe, Takumi Tandou, Kenetsu Yokogawa, Hiroshi Ito | 2020-11-03 |
| D900760 | Ion shield plate for semiconductor manufacturing apparatus | Michiaki Kobayashi, Kazuyuki Hirozane, Kohei Kawamura, Nobuya Miyoshi, Hiroyuki Kobayashi | 2020-11-03 |